Combinatorial analyses of plasma–polymer interactions-Reference-Cited by-同舟云学术

Combinatorial analyses of plasma–polymer interactions

Published:2011-07 Issue: Volume:205 Page:S484-S489
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Setsuhara Yuichi,Cho Ken,Takenaka Kosuke,Shiratani Masaharu,Sekine Makoto,Hori Masaru

Funder

The Global COE Program “Center of Excellence for Advanced Structural and Functional Materials Design”

Inter-University Cooperative Research Project on “Advanced Materials Development and Integration of Novel Structured Metallic and Inorganic Materials”

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference26 articles.

1. Process for High Speed Micro Electro Mechanical Systems (MEMS) Scanning Mirrors with Vertical Comb Drives

2. Fabrication of micro sensors on a flexible substrate

3. Silicon nitride thin films deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition for micromechanical system applications

4. Maskless etching of microstructures using a scanning microplasma etcher

5. Deep dry etching of borosilicate glass using fluorine-based high-density plasmas for microelectromechanical system fabrication

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