Relative sputtering rates of oxides and fluorides of aluminum and yttrium-Reference-Cited by-同舟云学术

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Relative sputtering rates of oxides and fluorides of aluminum and yttrium

Published:2017-01 Issue: Volume:309 Page:694-697
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Kim Dae-Min,Jang Mi-Ran,Oh Yoon-Suk,Kim Seongwon,Lee Sung-Min,Lee Sang-Ho

Funder

Ministry of Trade, Industry and Energy

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference17 articles.

1. Current status and needs in the future of ceramics used for semiconductor production equipment;Kobayashi,2005

2. Reduction of particle contamination in plasma-etching equipment by dehydration of Chamber Wall;Ito;Jpn. J. Appl. Phys.,2008

3. Plasma-resistant dense yttrium oxide film prepared by aerosol deposition process;Iwasawa;J. Am. Ceram. Soc.,2007

4. Effect of artificial pores and purity on the erosion behaviors of polycrystalline Al2O3 ceramics under fluorine plasma;Kim;J. Ceram. Soc. Jpn.,2009

5. Erosion behavior of YAG ceramics under fluorine plasma and their XPS analysis;Kim;J. Korean Ceram. Soc.,2009

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1. Plasma etching resistance and mechanical properties of polymorph Gd2O3-MgO nanocomposite with Zr phase stabilizer incorporation;Applied Surface Science;2024-11

2. Optimization of a TEOS addition on plasma resistance of YAG ceramics;International Journal of Applied Ceramic Technology;2024-05-22

3. CMOS-Compatible Wafer-Level Double-layer Silicon Nanograss through Reactive Ion Etching for Applications in Optics;ACS Applied Nano Materials;2024-05-03

4. Effect of porosity on etching rate and crater-like microstructure of sintered Al2O3, Y2O3, and YAG ceramics in plasma etching;Ceramics International;2024-05

5. Analysis of plasma etching reactivity of bismuth aluminosilicate glasses using fluorine concentration;Journal of Non-Crystalline Solids;2024-04

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