β- (Me1, Me2) and MeNx films deposited by magnetron sputtering: Novel heterostructural alloy and compound films
Author:
Funder
Czech Science Foundation
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference25 articles.
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3. Growth and characterization of Ta/Ti bi-layer films on glass and Si (111) substrates by direct current magnetron sputtering;Zhou;Appl. Surf. Sci.,2012
4. Sanchete: Ni-free superelastic binary Ti-Nb coatings obtained by Dc magnetron co-sputtering;Adache;Surf. Coat. Technol.,2015
5. Alpha- vs, beta-W nanocrystalline thin films: a comprehensive study of sputter parameters and resulting materials' properties;Wullers;Thin Solid Films,2015
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