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Deposition of aromatic polyimide thin films in supercritical carbon dioxide

  • Published:2014-10 Issue: Volume:94 Page:147-153
  • ISSN:0896-8446
  • Container-title:The Journal of Supercritical Fluids
  • language:en
  • Short-container-title:The Journal of Supercritical Fluids

Author:

Haruki Masashi,Hasegawa Yumi,Fukui Naoya,Kihara Shin-ichi,Takishima Shigeki

Funder

Ministry of Education, Culture, Science and Technology of Japan

Kyoto Technoscience Center

Publisher

Elsevier BV

Subject

Physical and Theoretical Chemistry,Condensed Matter Physics,General Chemical Engineering

Reference31 articles.

Cited by 13 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Microfabrication of functional polyimide films and microstructures for flexible MEMS applications;Microsystems & Nanoengineering;2023-03-21

2. Processing of Polyimide Using Supercritical Carbon Dioxide;The Review of High Pressure Science and Technology;2022-12-01

3. New High-Performance Materials: Bio-Based, Eco-Friendly Polyimides;Polyimide for Electronic and Electrical Engineering Applications;2021-05-05

4. Polyimide in Electronics: Applications and Processability Overview;Polyimide for Electronic and Electrical Engineering Applications;2021-05-05

5. Filling the Microscopic-scale Spaces with Polyamic Acid and Polyimide of the PMDA-ODA and PMDA-TFDB Pairs Using Supercritical Carbon Dioxide at Low Deposition Temperature;JOURNAL OF CHEMICAL ENGINEERING OF JAPAN;2019-02-20
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