Electrochemical characterization of localized corrosion mechanism of ALD Al2O3-coated copper for microelectronic application

Author:

Haeffele Romain,Marcelin SabrinaORCID,Broussous Lucile,Mazet Lucie,Normand BernardORCID

Funder

STMicroelectronics

Publisher

Elsevier BV

Reference53 articles.

1. Lifetime prediction of Cu-Al wire bonded contacts for different mould compounds;Rongen;2014 IEEE 64th Electron. Compon. Technol. Conf. (ECTC), Orlando, FL, USA,2014

2. On the intermetallic corrosion of Cu-Al wire bonds;Boettcher;2010 12th Electron. Packag. Technol. Conf., Singap.,2010

3. Cu wire and Pd-Cu wire package reliability and molding compounds;Abe;2012 IEEE 62nd Electron. Compon. Technol. Conf. San. Diego, CA, USA,2012

4. The interface behavior of the Cu-Al bond system in high humidity conditions;Kim;2010 12th Electron. Packag. Technol. Conf., Singap.,2010

5. Effect of wire size on the formation of intermetallics and Kirkendall voids on thermal aging of thermosonic wire bonds;Murali;Mater. Lett.,2004

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