A novel diffusion barrier of electrodeposited CoWP layer between copper and silicon: Preparation and performance

Author:

Hu Zhengyan,Ren Li,Zhao Kangning,Wei GuoyingORCID,Zhang Zhongquan,Han Tao,Zhong Fengping,Yuan MengORCID

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,General Physics and Astronomy,Condensed Matter Physics,Surfaces and Interfaces,General Chemistry

Reference26 articles.

1. Effect of phosphorus on the copper diffusion barrier properties of electroless CoWP films;Tsai;Thin Solid Films,2011

2. Transfer-free multi-layer graphene as a diffusion barrier;Mehta;Nanoscale,2017

3. The role of Ru passivation and doping on the barrier and seed layer properties of Ru-modified TaN for copper interconnects;Suresh;J. Chem. Phys.,2020

4. The oxide electrochemistry of ruthenium and its relevance to trench liner applications in damascene copper plating;Burke;J. Appl. Electrochem.,2008

5. Oxidation resistance of graphene-coated Cu and Cu/Ni alloy;Chen;ACS Nano,2011

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