The effect of the Ar/N2 gas ratio on the structure and properties of Ta-Si-N coatings produced by magnetron sputtering of TaSi2 target
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,General Physics and Astronomy,Condensed Matter Physics,Surfaces and Interfaces,General Chemistry
Reference56 articles.
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5. The effect of surface treatment on the corrosion behavior of pure Ta sheet in an equimolar NaCl-KCl melt at 850°C in air, part 2: Diamond film, TaC film, Ta-Si coating and Ta-Si-Al coating;Hu;Corros. Sci.,2019
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