Time evolution of surface species during the ALD of high-k oxide on InAs-Reference-Cited by-同舟云学术

Time evolution of surface species during the ALD of high-k oxide on InAs

Published:2023-07 Issue: Volume:39 Page:102927
ISSN:2468-0230
Container-title:Surfaces and Interfaces
language:en
Short-container-title:Surfaces and Interfaces

Author:

D'Acunto Giulio^ORCID,Shayesteh Payam,Kokkonen Esko^ORCID,Boix de la Cruz Virginia^ORCID,Rehman Foqia,Mosahebfard Zohreh,Lind Erik^ORCID,Schnadt Joachim,Timm Rainer^ORCID

Funder

Formas

VINNOVA

Svenska Forskningsrådet Formas

Vetenskapsrådet

Publisher

Elsevier BV

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