Effect of deposition and annealing temperature on mechanical properties of TaN film-Reference-Cited by-同舟云学术

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Effect of deposition and annealing temperature on mechanical properties of TaN film

Published:2011-11 Issue:3 Volume:258 Page:1033-1037
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Liu X.,Ma G.J.,Sun G.,Duan Y.P.,Liu S.H.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference28 articles.

1. Characterization and hardness modelling of alternate TIN/TICN multilayer cathodic arc PVD coating on tool steel

2. Friction and wear behaviour of TiN/Au, TiN/MoS2 and TiN/TiCN/a-C:H coatings

3. Comparative study of mechanical and structural properties of CrN films deposited by d.c. magnetron sputtering and vacuum arc evaporation

4. Handbook of Tribology;Bushan,1991

5. Deposition of tantalum nitride thin films by D.C. magnetron sputtering

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1. Influence of room-temperature oxidation on stability and performance of reactively sputtered TaN thin films for high-precision sheet resistors;Surfaces and Interfaces;2024-03

2. High-temperature resistance and self-lubricating TiAlTaCN nanocomposite hard coating by synergistic interaction of TiAlN(C) and TaN(C) phases;Corrosion Science;2024-02

3. WEAR AND ADHESION PROPERTIES OF MULTILAYER Ti/TiN ,(TiC)/TiCN/TaN THIN FILMS DEPOSITED ON Ti13Nb13Zr ALLOY BY CLOSE FIELD UNBALANCED MAGNETRON SPUTTERING;Acta Metallurgica Slovaca;2023-12-13

4. Thermal Stability of Oxidation-Resistant Ta-Zr-Si-B-N and Ta-Zr-Si-B-C Coatings under In Situ TEM Heating and Vacuum Annealing;Applied Sciences;2023-09-18

5. Effect of W content on mechanical and tribological behaviors of hard Ta1-xWxN films;International Journal of Refractory Metals and Hard Materials;2023-09

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