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Influence of the crystal orientation on the electrical properties of AlN thin films on LTCC substrates

  • Published:2010-11 Issue:3 Volume:257 Page:1088-1091
  • ISSN:0169-4332
  • Container-title:Applied Surface Science
  • language:en
  • Short-container-title:Applied Surface Science

Author:

Bittner A.,Ababneh A.,Seidel H.,Schmid U.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference20 articles.

1. Technology and applications of low temperature cofired ceramic (LTCC) based sensors and microsystems;Golonka;Bull. Pol. Acad. Sci.,2006

2. Overview of low temperature cofired ceramics tape technology for meso-system technology (MsST);Gongora-Rubio;Sensors Actuat. A,2001

3. Characteristics of thick film resistors embedded in low temperature co-fired ceramic (LTCC) substrates;His;J. Eur. Ceram. Soc.,2007

4. Aluminium nitride thin films on an LTCC substrate;Lee;J. Am. Ceram. Soc.,2005

5. Thermal design considerations for LTCC microwave packages;Müller,2006

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1. Application of Reactive Bonding Methods on LTCC Substrates;2023 24th European Microelectronics and Packaging Conference & Exhibition (EMPC);2023-09-11

2. AlN coatings with high thermal conductivity and excellent electrical properties for thermal management devices;Ceramics International;2023-06

3. Reactive Die Bonding on LTCC Substrates – Analysis by CFD Simulation;2023 24th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE);2023-04-17

4. Plasma Power Effect on Crystallinity and Density of Peald-Aln Thin Films： Toward Increasing Dielectric Constant and Breakdown Electric Field;2023

5. Enhancement of AlN Crystallisation for Thin Film Leakage Current Minimisation;2023
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