Substrate temperature effects on PEALD HfAlO dielectric films for IGZO-TFT applications
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Published:2024-08
Issue:
Volume:665
Page:160305
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ISSN:0169-4332
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Container-title:Applied Surface Science
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language:en
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Short-container-title:Applied Surface Science
Author:
Chen Han-Bin,
Hsu Chia-Hsun,
Wu Wan-Yu,
Zhang Wen-Zhi,
Zhang Jing,
Zhang Xiao-Ying,
Gao Peng,
Wuu Dong-Sing,
Lai Feng-Min,
Lien Shui-YangORCID,
Zhu Wen-Zhang