Early-stage silver growth during sputter deposition on SiO2 and polystyrene – Comparison of biased DC magnetron sputtering, high-power impulse magnetron sputtering (HiPIMS) and bipolar HiPIMS-Reference-Cited by-同舟云学术

Early-stage silver growth during sputter deposition on SiO2 and polystyrene – Comparison of biased DC magnetron sputtering, high-power impulse magnetron sputtering (HiPIMS) and bipolar HiPIMS

Published:2024-09 Issue: Volume:666 Page:160392
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Reck Kristian A.^ORCID,Bulut Yusuf,Xu Zhuijun,Liang Suzhe,Strunskus Thomas^ORCID,Sochor Benedikt^ORCID,Gerdes Holger,Bandorf Ralf^ORCID,Müller-Buschbaum Peter,Roth Stephan V.,Vahl Alexander,Faupel Franz^ORCID

Publisher

Elsevier BV

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