RF-plasma source qualification and compositional characterisation of GaNAs superlattices using SIMS

Author:

Mulcahy C.P.A.,Barker S.J.,Williams R.S.,Hopkinson M.,Ashwin M.J.,Stavrinou P.N.,Parry G.,Biswas S.,Jones T.S.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

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