Investigation on formation of thin Si-B-N films on stainless steel by plasma chemical vapor deposition
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry
Reference11 articles.
1. Effect of the gas mixture composition on high-temperature behavior of magnetron sputtered Si–B–C–N coatings
2. Amorphous Boron containing silicon carbo-nitrides created by ion sputtering
3. Development of a new generation of amorphous hard coatings based on the Si–B–C–N–O system for applications in extreme conditions
4. Silicoboron–carbonitride ceramics: A class of high-temperature, dopable electronic materials
5. A silicoboron carbonitride ceramic stable to 2,000°C
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