Effects of rf power on chemical composition and surface roughness of glow discharge polymer films

Author:

Zhang Ling,He Xiaoshan,Chen Guo,Wang Tao,Tang Yongjian,He Zhibing

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference27 articles.

1. Gas etching to obtain germanium doped CHx microshells compatible with the laser megajoule target specifications;Theobald;Fusion Sci. Technol.,2006

2. Coating and mandrel effects on fabrication of glow discharge polymer NIF scale indirect drive capsules;Nikroo;General Atomics Report,2002

3. Roughness optimization at high modes for GDP CHx microshells;Theobald;Fusion Sci. Technol.,2004

4. Growth precursors for a-C:H film deposition in pulsed inductively coupled methane plasmas;Bauer;J. Appl. Phys.,2005

5. Effect of substrate morphology on the roughness evolution of ultra thin DLC films;Zhong;Appl. Surf. Sci.,2008

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