Growth of amorphous SiC film on Si by means of ion beam induced mixing-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Growth of amorphous SiC film on Si by means of ion beam induced mixing

Published:2012-12 Issue: Volume:263 Page:367-372
ISSN:0169-4332
Container-title:Applied Surface Science
language:en
Short-container-title:Applied Surface Science

Author:

Barna Árpád,Gurban Sandor,Kotis László,Lábár János,Sulyok Attila,Tóth Attila L.,Menyhárd Miklós,Kovac Janez,Panjan Peter

Funder

NTPCRASH

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Surfaces and Interfaces,General Physics and Astronomy,General Chemistry

Reference25 articles.

1. Silicon carbide for microelectromechanical systems;Mehregany;Int. Mater. Rev.,2000

2. Growth and characteristics of polycrystalline 3C–SiC films for extreme environment micro/nano-electromechanical systems;Kim;Sens. Actuators A,2009

3. Silicon carbide high-power devices;Weitzel;IEEE Trans. Electron Dev.,1996

4. Evaluation of MEMS materials of construction for implantable medical devices;Kotzar;Biomaterials,2002

5. Mechanical and tribological properties of coatings sputtered from SiC target in the presence of CH4 gas;Kulikovsky;Surf. Coat. Technol.,2011

Cited by 16 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Effect of rapid thermal annealing on microstructure, mechanical and tribological properties of amorphous SiC hard coatings;Journal of Non-Crystalline Solids;2024-05

2. Evaluation of AES depth profiles with serious artefacts in C/W multilayers;Applied Surface Science;2022-04

3. Complementary physicochemical analysis by ellipsometry and Auger spectroscopy of nano-sized protective coating layers;Applied Surface Science;2020-12

4. Scratching resistance of SiC-rich nano-coatings produced by noble gas ion mixing;Surface and Coatings Technology;2020-03

5. Novel method for the production of SiC micro and nanopatterns;Surface and Coatings Technology;2019-08

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3