Study on ductile mode machining of single-crystal silicon by mechanical machining-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Study on ductile mode machining of single-crystal silicon by mechanical machining

Published:2017-02 Issue: Volume:113 Page:1-9
ISSN:0890-6955
Container-title:International Journal of Machine Tools and Manufacture
language:en
Short-container-title:International Journal of Machine Tools and Manufacture

Author:

Choi Dae-Hee,Lee Je-Ryung,Kang Na-Ri,Je Tae-Jin,Kim Ju-Young,Jeon Eun-chae

Funder

Ministry of Science, ICT and Future Planning

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering

Reference25 articles.

1. A stretchable form of single-crystal silicon for high-performance electronics on rubber substrates;Khang;Sci. Transl. Med.,2005

2. Growth of nanowire superlattice structures for nanoscale photonics and electronics;Gudiksen;Nature,2002

3. Thin-film silicon solar cell technology;Shah;Prog. Photovolt.,2004

4. Fabrication of 60-nm transistors on 4-in. wafer using nanoimprint at all lithography levels;Zhang;Appl. Phys. Lett.,2003

5. Fabrication of photonic crystals in silicon-on-insulator using 248-nm deep UV lithography;Wim;IEEE J. Sel. Top. Quant.,2002

Cited by 45 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Modeling and analysis of surface integrity transition in cutting of Sip/Al composites based on coordination deformation effect of particle-matrix;Tribology International;2024-11

2. Influence of Rapid Thermal Processing on the Machining Properties of Copper Thin Films for Nano/Micro Pattern Fabrication;Korean Journal of Metals and Materials;2024-09-05

3. Fundamental investigation on damage evolution and material removal mechanism in scratching anisotropic brittle material;Tribology International;2024-09

4. Modeling and experiment of material removal rate for cutting single-crystal silicon by electrical discharge wire sawing;The International Journal of Advanced Manufacturing Technology;2024-06-21

5. A theoretical and experimental investigation on the surface formation mechanism in elliptical vibration cutting of single crystal magnesium fluoride;Ceramics International;2024-06

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号京ICP备18003416号-3