Surface, structural, electrical and mechanical modifications of pulsed laser deposited ZrN thin films by implantation of MeV carbon ions
Author:
Funder
University of Engineering and Technology Lahore
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference49 articles.
1. Structure, electrical and chemical properties of zirconium nitride films deposited by dc reactive magnetron sputtering
2. Epitaxial Growth of (001)ZrN Thin Films on (001)Si by Low Temperature Process
3. Diffusion barrier properties of ZrN films in the Cu/Si contact systems
4. Tribological behaviour and mechanical properties of physical-vapour-deposited hard coatings: TiNx, ZrNx, TiCx, TiCx/i-C
5. Ar ions irradiation effects in ZrN thin films grown by pulsed laser deposition
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