FIB fabrication and irradiation test of stencil masks for heavy-ion patterned implantation for plasmonic application-Reference-Cited by-同舟云学术

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FIB fabrication and irradiation test of stencil masks for heavy-ion patterned implantation for plasmonic application

Published:2012-02 Issue: Volume:272 Page:183-187
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Zheng B.,Iketa N.,Takeda Y.,Sato K.,Sato R.,Amekura H.,Oyoshi K.,Kono K.,Edwards M.E.,Song M.,Ila D.,Kishimoto N.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference13 articles.

1. Electronic excitation effects on radiation damage in insulators under ion irradiation

2. Self-assembled two-dimensional distribution of nanoparticles with high-current Cu− implantation into insulators

3. FullWAVE 6.0 User Guide. RSoft Design Group Inc. (2007).

4. Anisotropic creep and growth of amorphous solids under swift heavy ion bombardment: An asymptotic thermal spike approach

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1. Study of the distribution profile of iron ions implanted into silicon;Semiconductors;2017-06

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