Assessment of surface potential models by molecular dynamics simulations of atom ejection from (100)-Si surfaces-Reference-Cited by-同舟云学术

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Assessment of surface potential models by molecular dynamics simulations of atom ejection from (100)-Si surfaces

Published:2013-05 Issue: Volume:303 Page:165-169
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Hobler G.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference25 articles.

1. Sputtering by Particle Bombardment, Experiments and Computer Calculations from Threshold to MeV Energies,2007

2. SRIM – the stopping and range of ions in matter (2010);Ziegler;Nucl. Instrum. Methods Phys. Res. B,2010

3. Angular distributions of sputtered silicon at grazing gallium ion beam incidence;Burenkov;Nucl. Instrum. Methods Phys. Res. B,2012

4. Dynamic binary collision simulation of focused ion beam milling of deep trenches;Hobler;Nucl. Instrum. Methods Phys. Res. B,2011

5. S.J. Lindsey, G. Hobler, Sputtering of silicon at glancing incidence, these proceedings.

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1. Enabling attractive-repulsive potentials in binary-collision-approximation monte-carlo codes for ion-surface interactions;Materials Research Express;2023-12-01

2. New Compound and Hybrid Binding Energy Sputter Model for Modeling Purposes in Agreement with Experimental Data;The Planetary Science Journal;2023-05-01

3. Binary collision approximation simulations of ion solid interaction without the concept of surface binding energies;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2022-04

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