Proton beam writing of submicrometer structures at LIPSION
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference19 articles.
1. Proton beam writing: a progress review
2. Measurement of cell motility on proton beam micromachined 3D scaffolds
3. Fabrication of high aspect ratio 100nm metallic stamps for nanoimprint lithography using proton beam writing
4. Fabrication of a free standing resolution standard for focusing MeV ion beams to sub 30nm dimensions
5. Micromachining of silicon with a proton microbeam
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1. Evolution in Lithography Techniques: Microlithography to Nanolithography;Nanomaterials;2022-08-11
2. Design considerations for a compact proton beam writing system aiming for fast sub-10 nm direct write lithography;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2017-08
3. Performance test of high brightness nano-aperture ion source;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2017-08
4. The effect of local fluence on the micropatterning of poly(ethylene terephthalate) foils through proton beam writing;Applied Physics A;2016-06-22
5. Microbeam systems at TIARA;International Journal of PIXE;2015-01
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