Fabrication of micro-structured tunnels in PMMA using P-beam writing-Reference-Cited by-同舟云学术

Fabrication of micro-structured tunnels in PMMA using P-beam writing

Published:2007-07 Issue:1 Volume:260 Page:366-371
ISSN:0168-583X
Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
language:en
Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Rout B.,Kamal M.,Dymnikov A.D.,Zachry D.P.,Glass G.A.

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference15 articles.

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2. Micromachining using deep ion beam lithography

3. B. Rout, R.D. Greco, A.D. Dymnikov, J.R. Reinhardt, J. Peeples, M. Kamal, M. Lentz, G.A. Glass, Emerging Lithographic Technologies IX, in: R. Scott Mackay (Ed.), Proc. SPIE, Vol. 5751, 2005, p. 1050.

4. Three-dimensional microfabrication in bulk silicon using high-energy protons

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