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Helium ion beam induced electron emission from insulating silicon nitride films under charging conditions

  • Published:2018-06 Issue: Volume:425 Page:11-17
  • ISSN:0168-583X
  • Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
  • language:en
  • Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Author:

Petrov Yu.V.,Anikeva A.E.,Vyvenko O.F.

Funder

RFBR

Publisher

Elsevier BV

Subject

Instrumentation,Nuclear and High Energy Physics

Reference27 articles.

1. Scanning Electron Microscopy and X-Ray Microanalysis;Goldstein,2007

2. Helium Ion Microscopy,2016

3. Practical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy;Seah,1983

4. The helium ion microscope;Notte,2016

5. Secondary electron generation in the helium ion microscope: basics and imaging;Petrov,2016
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