Nitrogen implantation into diamond-like carbon films prepared by bipolar-type plasma based ion implantation
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Nuclear and High Energy Physics
Reference22 articles.
1. Diamond-like amorphous carbon
2. A strategy for increased carbon ionization in magnetron sputtering discharges
3. Preparation of various DLC films by T-shaped filtered arc deposition and the effect of heat treatment on film properties
4. Effects of oxygen and nitrogen addition on the optical properties of diamond-like carbon films
5. Diamond-like carbon films formed by hydrocarbon plasma immersion ion implantation with methane/toluene mixtures
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4. Self‐ion irradiation on hydrogenated amorphous carbon films at depth of adhesion interlayer: Radiation‐induced atomic intermixing and degraded film properties;Surface and Interface Analysis;2020-04-22
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