Effects of experimental parameters on the physical properties of non-stoichiometric sputtered vanadium nitrides films
Author:
Publisher
Elsevier BV
Subject
General Chemistry,Catalysis
Reference10 articles.
1. Chemical bonding and electronic structure in binary VNy and ternary T1−xVxNy nitrides
2. Effect of La, B doping on the electrical resistivity and magnetic susceptibility of nanocrystalline vanadium nitride
3. Excimer laser reactive deposition of vanadium nitride thin films
4. Crystallographic structure and composition of vanadium nitride films deposited by direct sputtering of a compound target
5. Reactive magnetron sputter deposition of polycrystalline vanadium nitride films
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