Precise positioning of piezo-actuated stages using hysteresis-observer based control
Author:
Funder
National Science Council
Publisher
Elsevier BV
Subject
Electrical and Electronic Engineering,Computer Science Applications,Mechanical Engineering,Control and Systems Engineering
Reference14 articles.
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3. Intelligent control of piezoelectric actuators;Stepanenko;Proc IEEE Conf Deci Control,1998
4. Generalized Preisach model for hysteresis nonlinearity of piezoceramic actuator;Ge;Precis Eng,1997
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