Large-area surface treatment by ion beam technique

Author:

Wu Richard L.C.,Lanter William,Wrbanek John,DeJoseph Charles

Publisher

Elsevier BV

Reference12 articles.

1. R.L.C. Wu, William Lanter, Apparatus Modification For Large Area Surface Treatment, Final Report WL-TR-95-2106.

2. Plasma Deposited Thin Films;Augus,1986

3. Uniform And Large Area Deposition Of Diamond-Like Carbon Using Rf Source Ion Beam

4. In situ Monitoring of the Effects of Gas Mixtures on Ion Beam Depositions of Diamond-Like Carbon Films

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