a-C:H thin films deposited by radio-frequency plasma: influence of gas composition on structure, optical properties and stress levels
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry
Reference65 articles.
1. Structure-property relationships in dual-frequency plasma deposited hard a-C : H films
2. Optical and tribological properties of heat-treated diamond-like carbon
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