Dual-anode magnetron sputtering-Reference-Cited by-同舟云学术

Dual-anode magnetron sputtering

Published:2003-01 Issue: Volume:163-164 Page:695-702
ISSN:0257-8972
Container-title:Surface and Coatings Technology
language:en
Short-container-title:Surface and Coatings Technology

Author:

Belkind A,Zhao Z,Scholl R

Publisher

Elsevier BV

Subject

Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics,General Chemistry

Reference16 articles.

1. D.A. Glocker, 42nd Annual Technical Conference Proceedings of the SVC, Chicago, 87 (1999).

2. R. Scholl, A. Belkind, Z. Zhao, 42nd Annual Technical Conference Proceedings of the SVC, Chicago, 169 (1999).

3. D. Schatz, R. Scholl, US Patent (1999).

4. A. Belkind, Z. Zhao, G. McDonough, G. Roche, R. Scholl, 44th Annual Technical Conference Proceedings of the SVC, Chicago, Philadelphia, 2001, pp. 130.

5. Electrical Probes for Plasma Diagnostics;Swift,1970

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