The performance of Pt bottom electrode and PZT films deposited on Al2O3 /Si substrate by using LaNiO3 film as an adhesion layer
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Condensed Matter Physics,General Chemistry
Reference22 articles.
1. Ferroelectric thin films for micro-sensors and actuators: a review
2. PZT thin films for microsensors and actuators: Where do we stand?
3. Growth of (100)-oriented LaNiO3 thin films directly on Si substrates by a simple metalorganic decomposition technique for the highly oriented PZT thin films
4. Preparation and characterization of sol–gel derived (100)-textured Pb(Zr,Ti)O3 thin films: PbO seeding role in the formation of preferential orientation
5. Ferroelectric properties of sol–gel deposited Pb(Zr,Ti)O3/LaNiO3 thin films on single crystal and platinized-Si substrates
Cited by 9 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Orientation control of Platinum electrode grown on silicon using [Ca2Nb3O10]− nanosheets as seed layer.;Thin Solid Films;2023-01
2. High performance LaNiO3-buffered, (001)-oriented PZT piezoelectric films integrated on (111) Si;Applied Physics Letters;2022-10-31
3. Highly textured Pt thin film grown at very low temperature using Ca2Nb3O10 nanosheets as seed layer;SN Applied Sciences;2020-02-20
4. The effect of misfit strain on the phase diagram and pyroelectric effect in (110) oriented Pb(Zr1−xTix)O3 thin films;Solid State Communications;2016-06
5. Effects of LaNiO3 seeding layers on the crystal structure and electrical properties in 0.94(Bi0.5Na0.5)TiO3–0.06BaTiO3 thin films;Ceramics International;2015-12
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