Sample preparation for atomic-resolution STEM at low voltages by FIB
Author:
Publisher
Elsevier BV
Subject
Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Reference46 articles.
1. High Resolution Focused Ion Beams: FIB and its Applications;Orloff,2003
2. A review of focused ion beam milling techniques for TEM specimen preparation;Giannuzzi;Micron,1999
3. Preparation of transmission electron microscopy cross-section specimens using focused ion beam milling;Langford;Journal of Vacuum Science and Technology A,2000
4. Nanofabrication of cylindrical STEM specimen of InGaAs/GaAs quantum dots for 3D-STEM observation;Ozasa;Ultramicroscopy,2004
5. Review of Atom Probe FIB-based specimen preparation methods;Miller;Microscopy and Microanalysis,2007
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