Micro/nanotribological characterization of PDMS and PMMA used for BioMEMS/NEMS applications-Reference-Cited by-同舟云学术

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Micro/nanotribological characterization of PDMS and PMMA used for BioMEMS/NEMS applications

Published:2005-11 Issue:1-4 Volume:105 Page:238-247
ISSN:0304-3991
Container-title:Ultramicroscopy
language:en
Short-container-title:Ultramicroscopy

Author:

Tambe Nikhil S.,Bhushan Bharat

Publisher

Elsevier BV

Subject

Instrumentation,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference33 articles.

1. Micromachined Transducers Sourcebook;Kovacs,1998

2. Microsystem Design;Senturia,2001

3. Fundamental of Microfabrication: The Science of Miniaturization;Madou,2002

4. Springer Handbook of Nanotechnology,2004

5. From Micro- to Nanofabrication with Soft Materials

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