Mechanical response of a capacitive microsensor under thermal load
Author:
Publisher
Elsevier BV
Subject
Applied Mathematics,Modeling and Simulation,Numerical Analysis
Reference5 articles.
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4. Effect of clamping conditions and built-in stresses on the thermopneumatic deflection of SiO2/Si membranes with various geometries;Malhaire;Sens Actuators,1999
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