Plasma immersion ion implantation for ULSI processing
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Published:1991-04
Issue:1-4
Volume:55
Page:811-820
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ISSN:0168-583X
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Container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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language:en
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Short-container-title:Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
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