The mechanical and structural properties of Ti films prepared by filtered arc deposition
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference39 articles.
1. Interfacial chemistry effects on the adhesion of sputter-deposited TiC films to steel substrates
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1. Substrate bias voltage and deposition temperature dependence on properties of rf-magnetron sputtered titanium films on silicon (100);Bulletin of Materials Science;2014-12
2. Thickness effect on properties of titanium film deposited by d.c. magnetron sputtering and electron beam evaporation techniques;Bulletin of Materials Science;2013-10
3. Effect of small concentrations of oxygen and nitrogen on the structure and mechanical properties of sputtered titanium films;Surface and Coatings Technology;2012-04
4. Air-Based Deposition of Conductive Nitride Thin Films by Sputtering;Journal of The Electrochemical Society;2011
5. Effect of substrate roughness on the contact damage of thin brittle films on brittle substrates;Thin Solid Films;2010-07
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