Contamination-free transfer of silicon wafers with a magnetic levitation transport system in vacuum-Reference-Cited by-同舟云学术

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Contamination-free transfer of silicon wafers with a magnetic levitation transport system in vacuum

Published:1990-01 Issue:7-9 Volume:41 Page:1843-1845
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Yamakawa H.,Moriyama I.,Minamigawa Y.,Maeba Y.,Takematsu T.,Nishitsuji M.,Fujiki O.,Asaishi T.,Koike T.

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference1 articles.

1. Proc 3rd Symp Automated Integrated Circuits Manufacturing;Moriyama,1988

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2. Development of 2-DOF tilting actuator with remote center of rotation for human operated non-contact handling tool;Mechatronics;2011-10

3. Extremely high vacuum system for long-distance transport;Vacuum;1993-05

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