Effects of ion implantation on nitriding metal by the plasma source nitriding
Author:
Publisher
Elsevier BV
Subject
Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation
Reference5 articles.
1. Some experimental studies on metal implantation
2. Proc 9th Symp ISIAT;Iwaki,1985
3. Characterisation of aluminium nitride layers formed directly by 700-800 keV15N2+implantation into aluminium
4. Proc 4th Int Conf Solid Film Surf;Nunogaki,1987
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