Saving energy in the make-up air unit (MAU) for semiconductor clean rooms in subtropical areas-Reference-Cited by-同舟云学术

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Saving energy in the make-up air unit (MAU) for semiconductor clean rooms in subtropical areas

Published:2008-01 Issue:8 Volume:40 Page:1387-1393
ISSN:0378-7788
Container-title:Energy and Buildings
language:en
Short-container-title:Energy and Buildings

Author:

Tsao Jhy-Ming,Hu Shih-Cheng,Chan David Yih-Liang,Hsu Rich Tsung-Chi,Lee Jane Car-Cheng

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Building and Construction,Civil and Structural Engineering

Reference8 articles.

1. Power consumption of semiconductor fabs in Taiwan;Hu;Energy,2003

2. Makeup air systems energy-saving opportunities;Brown;ASHRAE Transactions,1990

3. HVAC systems for semiconductor clean rooms—part 2: total system components;Naughton;ASHRAE Transactions,1990

4. Actual results of energy efficient designs;Ciborowski;Cleanroom Technology Forum Proceedings,1991

5. Energy saving in semiconductor cleanrooms by out-air handling unit performance improvement;Suzuki,2000

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1. Energy Consumption and Carbon Emission Reduction in HVAC System of a Dynamic Random Access Memory (DRAM) Semiconductor Fabrication Plant (fab);IEEE Transactions on Semiconductor Manufacturing;2024-05

2. Energy performance and energy conservation technologies for high-tech cleanrooms: State of the art and future perspectives;Renewable and Sustainable Energy Reviews;2023-09

3. Energy advantage of cold energy recovery system using water- and air-side free cooling technologies in semiconductor fabrication plant in summer;Journal of Building Engineering;2023-06

4. Adsorption equilibrium of ammonia and water on porous adsorbents at low pressure: Machine learning-based models;Journal of Cleaner Production;2022-12

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