Control-oriented thermal model and load identification for circulating cooling water system in precision process applications-Reference-Cited by-同舟云学术

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Control-oriented thermal model and load identification for circulating cooling water system in precision process applications

Published:2024-07 Issue: Volume:248 Page:123252
ISSN:1359-4311
Container-title:Applied Thermal Engineering
language:en
Short-container-title:Applied Thermal Engineering

Author:

Zeng Zhibo^ORCID,Zhang Wei,Cao Di,Yu Hangcheng,Li Xiaoping^ORCID

Publisher

Elsevier BV

Reference41 articles.

1. High precision and stability temperature control system for the immersion liquid in immersion lithography;Li;Flow Meas. Instrum.,2017

2. Optimal thermal actuation for mirror temperature control;Veldman;Comput. Methods Appl. Mech. Engrg.,2022

3. Dual scanning interferometric technique for measurements of the temperature and concentration dependence of the refractive index of liquids;Postnikov;Meas. Sci. Technol.,2021

4. Temperature decoupling control of double-level air flow field dynamic vacuum system based on neural network and prediction principle;Li;Eng. Appl. Artif. Intell.,2013

5. Design and optimization of thermal strategy to improve the thermal management of proton exchange membrane fuel cells;Xia;Appl. Therm. Eng.,2023

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1. Achieving high-precision supply air temperature in cleanrooms: Modeling and validation of air–water heat exchange process;International Journal of Heat and Mass Transfer;2024-11

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