Damage-free highly efficient polishing of single-crystal diamond wafer by plasma-assisted polishing-Reference-Cited by-同舟云学术

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Damage-free highly efficient polishing of single-crystal diamond wafer by plasma-assisted polishing

Published:2018 Issue:1 Volume:67 Page:353-356
ISSN:0007-8506
Container-title:CIRP Annals
language:en
Short-container-title:CIRP Annals

Author:

Yamamura K.^ORCID,Emori K.,Sun R.,Ohkubo Y.^ORCID,Endo K.,Yamada H.,Chayahara A.,Mokuno Y.

Funder

Adaptable and Seamless Technology Transfer Program

Target-Driven R&D

Osawa Scientific Studies Grants Foundation

Iketani Science and Technology Foundation

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering

Reference19 articles.

1. Developments of Elemental Technologies to Produce Inch-Size Single-Crystal Diamond Wafers;Yamada;Diamond and Related Materials,2011

2. Defect Analysis and Excitons Diffusion in Undoped Homoepitaxial Diamond Films after Polishing and Oxygen Plasma Etching;Volpe;Diamond and Related Materials,2009

3. Tribochemical Polishing CVD Diamond Film With FeNiCr Alloy Polishing Plate Prepared by MA-HPS Technique;Yuan;Diamond and Related Materials,2012

4. Chemical-Assisted Mechanical Polishing of Diamond Film on Wafer;Hocheng;Materials Science Forum,2006

5. Ultraviolet-Irradiated Precision Polishing of Diamond and Its Related Materials;Watanabe;Diamond and Related Materials,2013

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1. Rapid planarization of polycrystalline diamond by laser with response surface methodology;Optics & Laser Technology;2025-01

2. Roughness control in the processing of 2-inch polycrystalline diamond films on 4H-SiC wafers;Materials Science in Semiconductor Processing;2024-12

3. Cold plasma and different nano-lubricants multi-energy field coupling-assisted micro-milling of Al-Li alloy 2195-T8 and flow rate optimization;Journal of Manufacturing Processes;2024-10

4. Mechanochemical grinding with aluminium-coated nickel and diamond mixed abrasive vitrified bond wheel for reducing anisotropy in (100) surface single-crystal diamond processing;Ceramics International;2024-10

5. Advanced polishing methods for atomic-scale surfaces: A review;Materials Today Sustainability;2024-09

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