Atmospheric pressure plasma enabled polishing of single crystal sapphire-Reference-Cited by-同舟云学术

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Atmospheric pressure plasma enabled polishing of single crystal sapphire

Published:2015 Issue:1 Volume:64 Page:515-518
ISSN:0007-8506
Container-title:CIRP Annals
language:en
Short-container-title:CIRP Annals

Author:

Bastawros Ashraf F.,Chandra Abhijit,Poosarla Pavan A.

Funder

U.S. National Science Foundation

Publisher

Elsevier BV

Subject

Industrial and Manufacturing Engineering,Mechanical Engineering

Reference18 articles.

1. Solid State Lighting Research and Development: Manufacturing Roadmap,2012

2. Laser-Induced Plasma Micro-Machining (LIPMM) for Enhanced Productivity and Flexibility in Laser-Based Micro-Machining Processes;Malhotra;CIRP Annals – Manufacturing Technology,2013

3. Defectivity Avoidance in Chemical Mechanical Planarization: Role of Multi-Scale and Multi-Physics Interactions;Chandra;ECS Transactions,2010

4. Chemical Mechanical Polishing (CMP) Anisotropy in Sapphire;Zhu;Applied Surface Science,2004

5. The Effect of Abrasive Hardness on the Chemical-Assisted Polishing of (0001) Plane Sapphire;Zhu;Journal of Materials Research,2005

Cited by 22 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Feasibility and mechanism of atmospheric pressure cold plasma jet (APCPJ) assisted micro-milling of bulk metallic glasses (BMGs);Ceramics International;2024-04

2. Improving machinability of single-crystal silicon by cold plasma jet;Journal of Manufacturing Processes;2023-08

3. A review of low-temperature plasma-assisted machining: from mechanism to application;Frontiers of Mechanical Engineering;2023-03

4. Homogenization and reduction of the roughness of polished sapphire surfaces via inert gas plasma post-processing;Optical Materials Express;2022-10-18

5. Study on the grinding characteristics of fused glass through the dry chemical modification of atmospheric pressure plasma;The International Journal of Advanced Manufacturing Technology;2022-07-26

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