Analysis and enhancement of capacitive pressure sensor’s sensitivity through material engineering processes

Author:

Madupu Arunkumar,Sharma Avinash,Gowri Ishwari P.,Ijjada SreenivasaRao

Publisher

Elsevier BV

Subject

General Medicine

Reference20 articles.

1. Elliptic diaphragm capacitive pressure sensor and signal conditioning circuit fabricated in SiGe CMOS integrated MEMS;Sundararajan;IEEE Sensors Jr.,2015

2. ArunkumarMadupu, Dr. P. GowriIshwari, Dr. Sreenivasa Rao Ijjada., “Modeling and Analysis of MEMS Based Capacitive Pressure Sensor for Biomedical Application”,Jr of Adv Research in Dynamical & Control Systems, 12(2), 2373-238, 2020.

3. Silicon micromachined pressure sensors;Bhat;J. IISc,2007

4. Gitesh Mishra, NehaParas, ArtiArora and PJ George “Simulation of MEMS based capacitive Pressure sensor using COMSOL MultiPhysics”, IJAER, ISSN 0973-4562, 7(11), 2012.

5. Shivaleela G., Praveen, J, Manjunatha. D.V., and Habibuddin Shaik, “Comparative Study on Capacitive Pressure Sensor for Structural Health Monitoring Applications”, IJIRSET, ISSN: 2319-8753, 6(5), 2017.

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1. MEMS Based Capacitive Sensor for Detection of Heavy Metal Ions in Water;2023 IEEE 11th Conference on Systems, Process & Control (ICSPC);2023-12-16

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