Application of temporary adherence to improve the manufacturing of 3D thin silicon wafers

Author:

Abadie K.,Montméat P.,Enot T.,Fournel F.,Wimplinger M.

Funder

CARTENE EU

Publisher

Elsevier BV

Subject

Polymers and Plastics,General Chemical Engineering,Biomaterials

Reference29 articles.

1. Integration of a temporary carrier in a TSV process flow, electronic components and technology conference 2009;Charbonnier;ECTC,2009

2. Challenges and solutions for ultra-thin (50 μm) silicon using innovative ZoneBOND™ process;Vial;Electron Packag Technol Conf (EPTC),2012

3. Origin of the TTV of thin films obtained by temporary bonding ZoneBond® technology;Montméat;Microsyst Technol,2015

4. Innovative wafer-level encapsulation and underfill material for silicon interposer application;Ferrandon;Electron Compon Technol Conf,2013

5. Arrays of monocrystalline silicon micromirrors fabricated using cmos compatible transfer bonding;Niklaus;Jal of Micromechanical Syst,2003

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