Author:
Jeon Hyungmin,Oh Myungwon,Han Joung Woo,Lee Seungjun,Chang Jong-San,Choi Minkee
Funder
Samsung
Ministry of Science, ICT and Future Planning
National Research Foundation of Korea
Subject
Physical and Theoretical Chemistry,Catalysis
Reference27 articles.
1. A review of uses, environmental hazards and recovery/recycle technologies of perfluorocarbons (PFCs) emissions from the semiconductor manufacturing processes
2. Catalytic thermal decomposition of tetrafluoromethane (CF4): A review
3. Perfluorocarbons in the global atmosphere: tetrafluoromethane, hexafluoroethane, and octafluoropropane
4. Atmospheric Lifetimes of Long-Lived Halogenated Species
5. W.M. Haynes, CRC handbook of chemistry and physics, 95th ed., CRC press, Boca Raton, FL. Chapter 9, 2014, p. 65.
Cited by
1 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献