Ion Beam Deposition-Reference-Cited by-同舟云学术

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Ion Beam Deposition

Published:2001 Issue: Volume: Page:463-499
ISSN:
Container-title:Handbook of Thin Film Deposition Processes and Techniques
language:
Short-container-title:

Author:

McNeil John R.,McNally James J.,Reader Paul D.

Publisher

Elsevier

Reference33 articles.

1. Thin Film Processes;Harper,1978

2. Ion Beams with Applications to Ion Implantation;Wilson,1973

3. Ion Bombardment of Surfaces: Fundamentals and Applications;Harper,1984

4. Ion Source Design for Industrial Applications

5. Plasma Diagnostic Techniques;Chen,1965

Cited by 2 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Ion-Beam Lithography: Modelling and Analytical Description of the Deposited in Resist Energy;Technical Physics;2024-02

2. Metal Deposition: Plasma-Based Processes;Encyclopedia of Plasma Technology;2016-12-12

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