Author:
Glendinning William B.,Cerrina Franco
Reference139 articles.
1. High Resolution Pattern Replication Using Soft X-Rays;Spears;Electron. Lett.,1972
2. Pathways in Device Lithography;Gordon;IEEE Trans. Electron Devices,1975
3. Metrology Applied to X-Ray Lithography;Plotnik;SolidState Tech. J.,1989
4. Linewidth Control in X-Ray Lithography: The Influence of the Penumbral Shadow;Jaeger;Proc. SPIE- Int. Soc. Opt. Eng.,1984
5. Fully Scaled 0.5 μm Metal-Oxide Semiconductor Circuits by Synchrotron X-Ray Lithography: Mask Fabrication and Characterization;Viswanathan;J. Vac. Sci. Technol. B,1988