Surface roughness of ion implanted 〈100〉 silicon studied by atomic force microscopy
Author:
Publisher
Elsevier BV
Subject
Materials Chemistry,Surfaces, Coatings and Films,Surfaces and Interfaces,Condensed Matter Physics
Reference7 articles.
1. Surface Studies by Scanning Tunneling Microscopy
2. Scanning tunneling microscopy study of single-ion impacts on graphite surface
3. Scanning tunneling microscopy observation of local damages induced on graphite surface by ion implantation
4. Effect of ion implantation and surface structure of silicon on diamond film nucleation
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