Shallow trench isolation geometric influence of a recessed surface on array-type arrangements of nano-scaled devices strained by contact etch stop liner and Ge-based stressors-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

Shallow trench isolation geometric influence of a recessed surface on array-type arrangements of nano-scaled devices strained by contact etch stop liner and Ge-based stressors

Published:2016-11 Issue: Volume:618 Page:172-177
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Hsieh Chia-Ping,Liao Ming-Han,Lee Chang-Chun,Cheng Tsung-Chieh,Wang Chien-Ping,Huang Pei-Chen,Cheng Sen-Wen

Funder

National Center for High-Performance Computing

Ministry of Science and Technology (MOST), Taiwan, R.O.C.

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference24 articles.

1. Layout variation effects in advanced MOSFETs: STI-induced embedded SiGe strain relaxation and dual-stress-liner boundary proximity effect;Choi;IEEE Trans. Electron Devices,2010

2. Hole mobility enhancements and alloy scattering-limited mobility in tensile strained Si/SiGe surface channel metal-oxide-semiconductor field-effect transistors;Leitz;J. Appl. Phys.,2002

3. Strained Si, SiGe, and Ge channels for high-mobility metal-oxide-semiconductor field-effect transistors;Lee;J. Appl. Phys.,2005

4. Chip optimization through STI-stress-aware placement perturbations and fill insertion;Kahng;IEEE Trans. Comput. Aided Des. Integr. Circuits Syst.,2008

5. New observations in LOD effect of 45-nm P-MOSFETs with strained SiGe source/drain and dummy gate;Cheng;IEEE Trans. Electron Devices,2009

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP