Microstructures, electrical and mechanical properties of the magnetron sputter deposited metal thin films at variable angles-Reference-Cited by-同舟云学术

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Microstructures, electrical and mechanical properties of the magnetron sputter deposited metal thin films at variable angles

Published:2024-08 Issue: Volume:802 Page:140438
ISSN:0040-6090
Container-title:Thin Solid Films
language:en
Short-container-title:Thin Solid Films

Author:

Kim Taeyeop,Lee Dongwoo^ORCID

Publisher

Elsevier BV

Reference90 articles.

1. Glancing angle deposition: fabrication, properties, and applications of micro-and nanostructured thin films;Hawkeye;J. Vacuum Sci. Technol. A: Vacuum Surf. Films,2007

2. Thin film microstructure control using glancing angle deposition by sputtering;Sit;J. Mater. Res.,1999

3. Oblique evaporation and surface diffusion;Abelmann;Thin Solid Films,1997

4. Glancing angle deposition to modify microstructure and properties of sputter deposited chromium thin films;Lintymer;Surf. Coat. Technol.,2003

5. Sculptured thin films and glancing angle deposition: growth mechanics and applications;Robbie;J. Vacuum Sci. Technol. A: Vacuum Surf. Films,1997

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