Effect of chemical activity of bulk and pad materials on the redeposition layer during polishing of glass

Author:

Cai ChaoORCID,Liu Yunxia,He Xiang,Zhao Heng,Wang Gang,Huang Jinyong,Hu Qing,Xie Lei,Ma Ping,Yan Dingyao,Yin Liangjun

Funder

National Natural Science Foundation of China

Publisher

Elsevier BV

Subject

Materials Chemistry,Metals and Alloys,Surfaces, Coatings and Films,Surfaces and Interfaces,Electronic, Optical and Magnetic Materials

Reference20 articles.

1. Modeling Interfacial Glass-Water Reactions: Recent Advances and Current Limitations;Pierce;International Journal of Applied Glass Science,2014

2. Surface hydration and nanoindentation of silicate glasses;Tadjiev;Journal of Non-Crystalline Solids,2010

3. Insight into silicate-glass corrosion mechanisms;Cailleteau;Nature Materials,2008

4. Origin and distribution of redeposition layer in polished fused silica;Wang;Optical Engineering,2015

5. Chemistry and Formation of the Beilby Layer During Polishing of Fused Silica Glass;Suratwala;Journal of the American Ceramic Society,2015

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